Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and method for manufacturing piezoelectric element

A method for manufacturing a piezoelectric element, comprising;

• a lower electrode formation process for forming two or more lower electrodes;
• a piezoelectric layer formation process for forming a piezoelectric layer on each of the lower electrodes;
• a first upper electrode film formation process for forming a first upper electrode film facing the two or more lower electrodes and containing iridium on the piezoelectric layers;
• a second upper electrode film formation process for forming a second upper electrode film containing titanium as the top layer of an upper electrode on the first upper electrode film;
• an upper electrode formation process for forming the upper electrode having a first upper electrode and a second upper electrode by patterning the first upper electrode film and the second upper electrode film;
• a first lead electrode film formation process for forming a first lead electrode film containing nickel and chromium on the second upper electrode;
• a second lead electrode film formation process for forming a second lead electrode film on the first lead electrode film;
• and
• a lead electrode formation process for forming a lead electrode having a first lead electrode and a second lead electrode by etching the first lead electrode film and the second lead electrode film by wet etching.