Flexible film interferometric modulator devices and methods of forming the same
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorMarc M. Mignard
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Abstract
The present disclosure provides systems, methods and apparatus for providing interferometric modulator displays using flexible films. In one aspect, a method of forming an interferometric modulator device includes providing a conductive element, depositing a reflective layer over at least a portion of the conductive element, and depositing a plurality of spacing elements over the conductive element. The absorber layer and the substrate are provided over the conductive element such that the absorber layer is disposed between the substrate and the spacing elements.
Claims49
A device comprising:
- a plurality of display elements, each element including
- a conductive element;
- a flexible film including a partially reflective and partially transmissive absorber layer;
- and
- a reflective layer disposed on the conductive element, the reflective layer disposed at least partially between the flexible film and the conductive element,
- wherein the reflective layer and the absorber layer define a cavity therebetween and wherein the flexible film is configured to move toward the conductive element when a voltage is applied across the flexible film and the conductive element due to an electrostatic force generated between the flexible film and the conductive element.
A device comprising
- a flexible absorber layer, wherein the absorber layer is partially reflective and partially transmissive;
- a printed circuit board including at least one conductive trace element;
- and
- a reflective layer disposed over the conductive trace element,
- wherein the flexible absorber layer is configured to move toward the printed circuit board when a voltage is applied between the absorber layer the conductive trace element, and wherein movement of the absorber layer alters the optical characteristics of the display device.
A device comprising:
- display means including
- means for applying a voltage;
- flexible means for partially reflecting and transmitting light;
- and
- means for reflecting light disposed on the voltage applying means,
- wherein the reflective means is disposed at least partially between the flexible means and the voltage applying means,
- wherein the reflective means and the flexible means define a cavity therebetween and wherein the flexible means is configured to move toward the voltage applying means when a voltage is applied between the flexible means and the voltage applying means.
A method of manufacturing a device, comprising:
- depositing an absorber layer on a sacrificial material, wherein the absorber layer includes a partially reflective and transmissive material;
- providing a substrate;
- depositing a first adhesive layer on the substrate;
- depositing a second adhesive layer on the substrate, wherein the first adhesive layer and the second adhesive layer are substantially co-planar and are spaced apart from one another on a common plane;
- positioning the absorber layer over the first and second adhesive layers such that the absorber layer contacts the first and second adhesive layers;
- and
- developing the adhesive layer.
A method of manufacturing a device, the method comprising:
- providing a substrate;
- depositing an adhesive inhibiting material on the substrate;
- depositing an absorber layer over the adhesive inhibiting material, wherein the absorber layer includes a partially reflective and transmissive material;
- providing an electrode;
- and
- applying a voltage between the absorber layer and the electrode to pull a portion of the absorber layer away from the substrate.
Dependencies are inferred from the claim text.