Vibrator element, vibrator, vibration device, and electronic device
AssigneeSeiko Epson Corporation
InventorHiroki KAWAI
Life of this patent
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AssigneeSeiko Epson Corporation
InventorHiroki KAWAI
Estimating the term…
A vibrator element includes: a base portion; a plurality of vibrating arms which extends in the Y-axis direction from the base portion so as to be arranged in a line in the X-axis direction, and piezoelectric elements which are formed on the vibrating arms so as to allow the vibrating arms to perform flexural vibration in the Z-axis direction. The respective vibrating arms include first surfaces which are compressed or expanded in response to flexural vibration and second surfaces which are expanded when the first surfaces are compressed and which are compressed when the first surfaces are expanded. The vibrating arms have the piezoelectric elements which are formed close to the first surfaces, and the other vibrating arm has the piezoelectric element which is formed close to the second surface.
A vibrator element comprising:
Dependencies are inferred from the claim text.