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US 2012/0056507 A1Published application
Microacoustic Component and Production Method
AssigneeEpcos AG
InventorsChristoph Eggs, Gudrun Henn, Werner Ruile, Guenter Scheinbacher, Siegfried Menzel, Mario Spindler
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Abstract
The microacoustic component has a substrate that has at least one layer (composed of a dielectric or piezoelectric material, and a metallic strip structure. The layer is composed of a dielectric or piezoelectric material and/or the metallic strip structure have/has been produced or can be produced by the atomic layer deposition method.
Claims20
A microacoustic component comprising:
- a substrate;
- at least one layer comprising a dielectric or piezoelectric material disposed over the substrate;
- and
- a metallic layer portion strip structure deposited over the at least one layer;
- wherein the at least one layer is embodied as an atomic layer deposition (ALD) layer and/or the metallic layer or strip structure is embodied as an ALD layer.
2 more elements
A method for producing a microacoustic component, the method comprising:
- using an atomic layer deposition method to form a first portion of the microacoustic component;
- and
- completing the microacoustic component.
A method of forming a microacoustic component the method comprising:
- forming at least one layer comprising a dielectric or piezoelectric material over the substrate;
- and
- depositing a metallic layer or strip structure over the at least one layer;
- wherein forming the at least one layer comprises performing an atomic layer deposition (ALD) layer and/or depositing the metallic layer or strip structure comprises performing an ALD method.
1 more element
Dependencies are inferred from the claim text.