Mems based pyroelectric thermal energy harvester

A pyroelectric thermal energy harvesting apparatus for generating an electric current comprising:

• a first surface having a first temperature (TH);
• a second surface spaced apart from the first surface, the second surface having a second temperature (TL) that is less the first temperature (TH) resulting in a temperature difference between the first surface and the second surface;
• a layered capacitor disposed between the first surface and the second surface, the capacitor having,
• a conductive, bimetal top electrode layer cantilevered from one of the first surface and the second surface by an anchor,
• a conductive bottom electrode layer facing the second surface,
• a pyroelectric dielectric layer sandwiched between the top and bottom electrodes;
• a pair of proof masses, one proof mass affixed to each electrode layer and each facing one of the first surface and the second surface;
• and
• wherein the temperature difference between the first surface and the second surface causes the layered capacitor to deform by differential thermal expansion between the top electrode layer and the dielectric layer, causing the proof masses to alternately contact the first and second surfaces at the resonant frequency of the layered capacitor such that a pyroelectric current is generated between the electrodes.