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AssigneesCommissariat a l'Energie Atomique, Freescale Semiconductor, Inc.
InventorsFrancois Perruchot, Lianjun Liu, Sergio Pacheco, Emmanuel Defay, Patrice Rey
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A method of forming an electromechanical transducer device comprises forming on a fixed structure a movable structure and an actuating structure of the electromechanical transducer device, wherein the movable structure is arranged in operation of the electromechanical transducer device to be movable in relation to the fixed structure in response to actuation of the actuating structure. The method further comprises providing a stress trimming layer on at least part of the movable structure, after providing the stress trimming layer, releasing the movable structure from the fixed structure to provide a released electromechanical transducer device, and after releasing the movable structure changing stress in the stress trimming layer of the released electromechanical transducer device such that the movable structure is deflected a predetermined amount relative to the fixed structure when the electromechanical transducer device is in an off state.
A method of forming an electromechanical transducer device comprising:
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A method of forming an electromechanical transducer device comprising a movable structure and an actuating structure formed on a fixed structure, the movable structure being arranged in operation of the electromechanical transducer device to be movable in relation to the fixed structure in response to actuation of the actuating structure, the method comprising:
An electromechanical transducer device comprising:
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Dependencies are inferred from the claim text.