Imaging device, imaging module and method for manufacturing imaging device

An imaging module comprising:

• an imaging device;
• and
• a lens,
• the imaging device including:
• a substrate having a first major surface, a second major surface on a side opposite to the first major surface, a recess portion provided on the first major surface and retreated in a first direction going from the first major surface to the second major surface, and a through hole communicating with the first major surface and the second major surface and extending in the first direction;
• a photodetecting portion provided above the recess portion and away from the substrate;
• a circuit portion electrically connected to the photodetecting portion and provided on the first major surface;
• a through interconnect electrically connected to the circuit portion and provided inside the through hole;
• and
• a lid provided above a side opposite to the substrate of the photodetecting portion and away from the photodetecting portion,
• the recess portion having a first inclined surface inclined to the first major surface, and
• the through hole having a second inclined surface in parallel with the first inclined surface, and
• the lens provided on the lid of the imaging device.

A manufacturing method of an imaging device comprising:

• forming a photodetecting portion on a first major surface of a substrate and a circuit portion electrically connected to the photodetecting portion;
• etching for forming at least a part of a through hole penetrating the substrate along a direction orthogonal to the first major surface while forming a recess portion in the substrate between the substrate and the photodetecting portion;
• and
• forming a through interconnect electrically connected to the circuit portion inside the through hole.