Thin-film solar fabrication process, deposition method for solar cell precursor layer stack, and solar cell precursor layer stack
AssigneeApplied Materials, Inc.
InventorsStefan KLEIN, Konrad SCHWANITZ, Tobias STOLLEY
Life of this patent
Estimating the term…
Abstract
A method of manufacturing a layer stack adapted for a thin-film solar cell and a precursor for a solar cell are described. The method includes depositing a TCO layer over a transparent substrate, depositing a first conductive-type layer, wherein the depositing includes: providing for a first SiOx-containing anti-reflection layer by chemical vapor deposition. The method further includes depositing a first intrinsic-type layer and depositing a further conductive-type layer with a conductivity opposite to the first conductive-type layer.
Claims19
A method of manufacturing a layer stack configured for an optoelectronic conversion module, the method comprising:
- depositing a TCO layer over a transparent substrate;
- depositing a first conductive-type layer, the depositing-comprises:
- providing for a first SiOx-containing anti-reflection layer by chemical vapor deposition;
- depositing a first intrinsic-type layer;
- and
- depositing a further conductive-type layer with a conductivity opposite to the first conductive-type layer.
A precursor for an optoelectronic conversion module, comprising:
- a transparent substrate;
- a TCO layer deposited over the substrate;
- a first conductive-type layer, wherein the first conductive-type layer comprises:
- a first SiOx-containing anti-reflection layer deposited by chemical vapor deposition;
- a first intrinsic-type layer;
- and
- a further conductive-type layer with a conductivity opposite to the first conductive-type layer.
Dependencies are inferred from the claim text.