MEMS Transducer for an Audio Device
AssigneeKnowles Electronics Asia PTE. Ltd.
InventorsTwan Van Lippen, Geert Langereis, Josef Lutz, Hilco Suy, Cas Van Der Avoort, Andreas Bernardus Maria Jansman
Life of this patent
Estimating the term…
Abstract
A MEMS transducer (10) for an audio device comprises a substrate (12), a membrane (14) attached to the substrate (12), and a back-electrode (18) attached to the substrate (12), wherein a resonant frequency of the back-electrode (18) is matched to a resonant frequency of the membrane (14). Further, a method of manufacturing a MEMS transducer (19) for an audio device comprises attaching a membrane to a substrate (12), attaching a back-electrode (18) to the substrate (12), matching a resonant frequency of the back-electrode (18) to a resonant frequency of the membrane (14).
Claims16
A MEMS transducer for an audio device, the MEMS transducer comprising:
- a substrate,
- a membrane attached to the substrate, and
- a back-electrode attached to the substrate, wherein a resonant frequency of the back-electrode is matched to a resonant frequency of the membrane.
A method of manufacturing a MEMS transducer for an audio device, the method comprising:
- attaching a membrane to a substrate,
- attaching a back-electrode to the substrate, matching a resonant frequency of the back-electrode to a resonant frequency of the membrane.
Dependencies are inferred from the claim text.