Self-supporting CVD diamond film and method for producing a self-supporting CVD diamond film
AssigneeFriedrich-Alexander-Universitaet Erlangen-Nuernberg
InventorsStefan Rosiwal, Jan Fandrey, Karsten Kellermann, Matthias Lodes
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Abstract
The invention relates to a self-supporting CVD diamond film comprising a plurality of diamond layers (8) lying one over the other, wherein a lower side of each diamond layer (8) is made of diamond having a first average crystal size of 2 to 50 nm, wherein the average crystal size increases within the diamond layer (8) from the lower side to an upper side of the diamond layer (8), and wherein a second average crystal size in the area of the upper side is 50 to 500 nm.
Claims19
1-24. (canceled)
Self-supporting CVD diamond film, comprising a plurality of diamond layers (8) stacked one on top of the other, wherein an underside of each diamond layer (8) is formed from diamond with a first average crystal size of 2 to 50 nm, wherein the average crystal size inside the diamond layer (8) increases from the underside to a top side of the diamond layer (8) and wherein a second average crystal size in the region of the top side is 50 to 500 nm.
Dependencies are inferred from the claim text.