Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method
AssigneeNikon Corporation
InventorYasuo AOKI
Life of this patent
Estimating the term…
Abstract
In a substrate stage device, a substrate is held by a substrate support member mounted on a Y step surface plate. The substrate support member moves in the scanning direction in long strokes on the Y step surface plate. The part corresponding to an exposure area of the substrate is held by suction in a non-contact manner from below by a fixed point stage, and other parts are supported by levitation by the plurality of air floating devices placed on the Y step surface plate. The part corresponding to the exposure area of the substrate is controlled so that surface position of the substrate is located in the depth of focus of the projection optical system by the fixed point stage.
Claims41
A movable body apparatus, comprising:
- a first movable body which holds an edge of an object placed along a predetermined two-dimensional plane that is parallel to a horizontal plane, and is movable with predetermined strokes at least in a first direction within the two-dimensional plane;
- and
- a second movable body which includes an object support member that supports the object from below within a movable range in the first direction of the first movable body, and is movable in a second direction parallel to a second axis orthogonal to the first direction within the two-dimensional plane along with the first movable body.
An exposure apparatus that exposes an object with an energy beam and forms a pattern on the object, the apparatus comprising:
- a first movable body which holds an edge of the object placed along a predetermined two-dimensional plane that is parallel to a horizontal plane, and is movable with predetermined strokes at least in a first direction within the two-dimensional plane;
- a second movable body which includes an object support member that supports the object from below within a movable range in the first direction of the first movable body, and is movable in a second direction orthogonal to the first direction within the two-dimensional plane along with the first movable body;
- and
- an exposure system which exposes the object with the energy beam.
Dependencies are inferred from the claim text.