Ion doping apparatus and ion doping method
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsErumu KIKUCHI, Wataru SEKINE
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Abstract
When hydrogen is introduced into a plasma chamber which includes the dielectric plate as part of an exterior wall, and surface waves are generated on the dielectric plate using microwaves, a region where negative hydrogen ions are easily generated is formed in the plasma chamber. Since only hydrogen negative ions each with a molecular weight of 1 are generated, only ions with the same mass can be added to an object by application of an electric field, without mass separation.
Claims31
An ion doping apparatus comprising:
- a waveguide path through which microwaves are propagated;
- a plasma chamber including a dielectric plate, the dielectric plate configured to convert the microwaves into surface waves;
- a hydrogen supply portion which supplies hydrogen to the plasma chamber;
- and
- an electric field generating portion configured to accelerate negative ions generated from the hydrogen by the surface waves in the plasma chamber,
- wherein the dielectric plate is a partition between the waveguide path and the plasma chamber.
An ion doping apparatus comprising:
- a waveguide path through which microwaves are propagated;
- a plasma chamber including a dielectric plate, the dielectric plate configured to convert the microwaves into surface waves;
- a hydrogen supply portion which supplies hydrogen to the plasma chamber;
- an electric field generating portion configured to accelerate negative ions generated from the hydrogen by the surface waves in the plasma chamber;
- and
- a doping chamber having a stage for holding an object to be doped,
- wherein the dielectric plate is a partition between the waveguide path and the plasma chamber.
An ion doping method comprising:
- supplying microwaves to a dielectric plate through a waveguide path to generate surface waves on the dielectric plate;
- activating hydrogen by an electric field of the surface waves to produce negative hydrogen ions;
- and
- accelerating the negative hydrogen ions by an electronic field produced by an accelerating electrode toward an object.
An ion doping method comprising:
- supplying microwaves to a dielectric plate through a waveguide path;
- generating surface waves in a plasma chamber by converting the microwaves into the surface waves using the dielectric plate;
- supplying hydrogen to the plasma chamber and generating negative hydrogen ions in the plasma chamber;
- extracting the negative hydrogen ions from the plasma chamber by an extracting electrode;
- and
- accelerating the negative hydrogen ions toward an object by an accelerating electrode.
Dependencies are inferred from the claim text.