Method of fabricating electrode structures on substrate
AssigneeIndustrial Technology Research Institute
InventorsKun-Mu Lee, Sz-Ping Fu, Wei-Hao Chiu, Chuan-Ya Hung
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Abstract
Methods for fabricating electrode structures on a substrate are presented. The fabrication method includes providing a substrate with a patterned metal layer thereon, defining an electrode area. A passivation glue is formed on the patterned metal layer. An electrode layer is formed in the electrode area. A filling process is performed to deposit nano metal oxides on the electrode layer to extensively fill the entire electrode area.
Claims14
A method for fabricating electrode structures on a substrate, comprising:
- providing a substrate having a patterned metal layer thereon to define an electrode area, wherein the patterned metal layer is covered by a passivation glue and an electrode layer is formed in the electrode area;
- and
- performing a filling step to deposit a nano metal oxide on the electrode area to fill the electrode area.
A method for fabricating electrode structures on a substrate, comprising:
- providing a transparent conductive substrate having a patterned metal layer thereon to define an electrode area, wherein the patterned metal layer is covered by a passivation glue and an electrode layer is formed in the electrode area;
- performing a first electrophoretic deposition to deposit small diameter nano metal oxide particles;
- and
- performing a second electrophoretic deposition to deposit large diameter nano metal oxide particles.
Dependencies are inferred from the claim text.