Holding unit, assembly system, sputtering unit, and processing method and processing unit
AssigneeNikon Corporation
InventorYuichi Shibazaki
Life of this patent
Estimating the term…
Abstract
Because an electromagnetic chuck supplies current to a specific microcoil among a plurality of microcoils and makes an object exert an electromagnetic force working together with a magnet of the object, the object can be held in a state where the object is set at a desired position (a position that corresponds to the microcoil to which current has been supplied) on a base surface. Further, by gas that blows out from a gas supply passage, a levitation force is given to the object, which can reduce effects of a friction force that acts between the object and an upper surface of the electromagnetic chuck when the position of the object is set.
Claims66
A processing unit, the unit comprising:
- a holding unit that holds an object that contains a magnetic substance at least partially, the holding unit comprising:
- a base on which the object is placed;
- a plurality of conductive materials arranged in the base that works with the magnetic substance to make the object exert an electromagnetic force;
- and
- a levitation force mechanism that gives levitation force to the object;
- a processing object that applies processing to the object held by the holding unit, wherein
- a relative positional relation between the holding unit and the processing object is variable.
An assembly system, the system comprising:
- a first holding unit that holds a first object which contains a magnetic substance at least partially, the first holding unit comprising:
- a base on which the object is placed;
- a plurality of conductive materials arranged in the base that works with the magnetic substance to make the object exert an electromagnetic force;
- and
- a levitation force mechanism that gives levitation force to the object;
- and
- a second holding unit that holds a second object, which is placed facing the first object held by the first holding unit.
A holding unit that holds an object that contains a magnetic substance at least partially, the holding unit comprising:
- a base on which the object is placed;
- a plurality of conductive materials arranged in the base that works with the magnetic substance to make the object exert an electromagnetic force;
- and
- an alignment unit that sets the position of the object with respect to the base prior to making the object exert the electromagnetic force.
A holding unit that holds an object that contains a magnetic substance at least partially, the holding unit comprising:
- a base on which the object is placed;
- a plurality of microcoils arranged in the base that works with the magnetic substance to make the object exert an electromagnetic force;
- and
- a control unit that connects to the plurality of microcoils and performs switching between supplying current to each of the microcoils and stopping the supply of current.
A sputtering unit that forms a thin film on a base material by making ions collide with a target material, the unit comprising:
- a base that has a plurality of microcoils and holds the base material;
- and
- a control unit that connects to the plurality of microcoils and performs switching between supplying current to each of the microcoils and stopping the supply of current.
A processing method in which a first object that contains a magnetic substance at least partially is processed using a second object, wherein
- a levitation force is given to the first object placed on a base,
- a plurality of conductive materials arranged in the base works with the magnetic substance to make the first object exert an electromagnetic force;
- and
- the second object is made to move close to or to be in contact with the first object.
A processing method in which a first object that contains a magnetic substance at least partially is processed using a second object, wherein
- alignment is performed on the first object with respect to a base,
- a plurality of conductive materials arranged in the base works with the magnetic substance to make the first object exert an electromagnetic force;
- and
- the second object is made to move close to or to be in contact with the first object.
A processing method in which a first object that contains a magnetic substance at least partially is processed using a second object wherein
- switching is performed between supplying current to a plurality of microcoils placed on a base where the first object is arranged and stopping the supply of current,
- the first object is made to exert an electromagnetic force generated between the microcoils and the magnetic substance, and
- the second object is made to move close to or to be in contact with the first object.
A processing unit that processes an object having a magnetic substance portion that contains a magnetic substance partially and an empty space portion formed in a state substantially enclosing the magnetic substance portion, the unit comprising:
- a base that has a holding surface that can hold the object;
- a magnetic suction unit arranged in the base that can magnetically suction the magnetic substance portion working with the magnetic substance;
- and
- a movement unit that moves the base in a direction intersecting with the holding surface in a state where the magnetic suction unit magnetically suctions the magnetic substance portion but does not magnetically suction the empty space portion.
A processing unit that processes an object having a magnetic substance portion that contains a magnetic substance partially and an empty space portion formed in a state substantially enclosing the magnetic substance portion, the unit comprising:
- a first base that has a holding surface that can hold the object;
- a magnetic suction mechanism arranged in the first base that can magnetically suction the magnetic substance portion working with the magnetic substance;
- a second base arranged facing the first base with the object in between;
- and
- a suction unit arranged in the second base that suctions a portion of the object that is not magnetically suctioned by the magnetic suction mechanism.
Dependencies are inferred from the claim text.