Ultrapure water production facility and method of monitoring ultrapure water

Abstract

By reducing the amount of monitoring water required to measure and monitor the quality of ultrapure water with a plurality of measuring instruments, the size of an ultrapure water production system is reduced, whereby the system cost is reduced. When a portion of ultrapure water supplied from the ultrapure water production system to a use point is separated to monitor the water quality, the water is allowed to pass through a monitoring system consisting of two or more stages of different types of water quality measuring devices connected in series so that the water quality is monitored. Because the ultrapure water extracted from a supply pipe extending from the ultrapure water production system to the use point is allowed to pass, in series, through two or more stages of different types of water quality measuring devices connected in series, by making these measuring instruments use the same monitoring water, which is required for measuring the water quality, the amount of monitoring water can be reduced. As a result, the size of the ultrapure water production system can be reduced, and hence, the system cost can be reduced.

Dependencies are inferred from the claim text.