Mounting table structure, film forming apparatus and raw material recovery method

A mounting table structure for use in forming a thin film on a surface of a target object mounted on the mounting table structure by using a raw material gas including an organic metal compound in a vacuum evacuable processing chamber, the mounting table structure comprising:

• a mounting table main body which mounts thereon the target object and has therein a heater;
• a base portion, made of a metal, which supports the mounting table main body and has therein a coolant path where a coolant flows therethrough;
• and
• a peripheral component which is detachably provided at an outer peripheral side of the mounting table main body so as to surround the mounting table main body and is maintained at a temperature equal to or higher than a decomposition temperature of the raw material gas during thin film formation,
• wherein the mounting table main body is supported at a bottom portion thereof by the base portion via a thermal insulator,
• wherein an edge ring, made of a metal, stands upright on a peripheral portion of the base portion so as to surround a side surface of the mounting table main body,
• wherein the edge ring forms a part of the peripheral component,
• wherein a thermal conduction buffer member is provided between the base portion and the edge ring, the thermal conduction buffer member being made of a metal having a thermal conductivity lower than a thermal conductivity of the metal forming the edge ring,
• wherein the mounting table main body and the edge ring are in contact with each other directly or partially through a thermal conduction facilitation member in order to improve a thermal conductivity therebetween, and
• wherein a space exists between an inner peripheral surface of the edge ring and an outer peripheral surface of the mounting table main body.

A raw material recovery method in a film forming apparatus for forming a thin film on a surface of a target object mounted on a mounting table structure in a vacuum evacuable processing chamber by using a raw material gas containing an organic metal compound, the raw material recovery method comprising:

• a coating film forming step of forming a coating film on a component detachably provided at the mounting table structure;
• an attaching step of forming a mounting table structure by attaching the component having the coating film to the mounting table structure;
• a film forming step of forming a thin film on the surface of the target object mounted on the mounting table structure having the component;
• a separating step of separating the component from the mounting table after the film forming step;
• a removing step of removing the thin film adhered on the component together with the coating film;
• and
• a recovery step of recovering a metal contained in the raw material from the removed thin film.

A raw material recovery method in a film forming apparatus for forming a thin film on a surface of a target object mounted on a mounting table structure in a vacuum evacuable processing chamber by using a raw material gas containing an organic metal compound, the raw material recovery method comprising:

• an attaching step of forming the mounting table structure by attaching a peripheral component to an outer peripheral side of a mounting table main body having a heater so as to surround the mounting table main body;
• a film forming step of forming a thin film on the surface of the target object mounted on the mounting table structure to which the peripheral component is attached, while maintaining a temperature of the target object and a temperature of the peripheral component at a level equal to or higher than the decomposition temperature of the raw material gas;
• a separating step of separating the peripheral component from the mounting table structure after the film forming step;
• a removing step of removing the thin film adhered on the peripheral component;
• and
• a recovery step of recovering a metal contained in the raw material from the removed thin film.