Processing apparatus

A processing apparatus including a processing chamber for processing an object to be processed by a corrosive gas containing halogen supplied thereinto, the processing apparatus comprising:

• a gas exhaust passage connected to the processing chamber, at least a part of the passage being made of a metal;
• a stabilization reaction unit which has an energy generator for supplying light energy or heat energy to the gas to be diffused from the metallic part of the gas exhaust passage toward the processing chamber and/or has an obstacle configured to apply a collision energy to the corrosive gas that is to be diffused from the metallic part of the gas exhaust passage toward the processing chamber, the collision energy being generated from a collision between the obstacle and said corrosive gas, and in which a reaction for stabilizing a compound containing the metal and the halogen contained in the gas in the gas exhaust passage takes place by means of at least one of the light energy, heat energy, and collision energy;
• and
• a trapping unit which traps the compound stabilized in the stabilization reaction unit.

A processing apparatus, including a processing chamber for processing an object to be processed by a corrosive gas containing halogen supplied thereinto, the processing apparatus comprising:

• an auxiliary passage connected to the processing chamber to allow a sub-device to be attached thereto, at least a part of the passage being made of a metal;
• a stabilization reaction unit which has an energy generator for supplying light energy or heat energy to the gas diffused from the metallic part of the auxiliary passage toward the processing chamber and/or has an obstacle configured to apply a collision energy to the corrosive gas that is to be diffused from the metallic part of the gas auxiliary passage toward the processing chamber, the collision energy being generated from a collision between the obstacle and said corrosive gas, and in which a reaction for stabilizing a compound containing the metal and the halogen contained in the gas in the auxiliary passage takes place by means of at least one of the light energy, heat energy, and collision energy;
• and
• a trapping unit which traps the compound stabilized in the stabilization reaction unit.