Pressure sensor
AssigneeSeiko Epson Corporation
InventorKenta SATO
Life of this patent
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AssigneeSeiko Epson Corporation
InventorKenta SATO
Estimating the term…
A pressure sensor includes a container; a pressure receiving member which constitutes a part of the container; a supporting member which extends from a peripheral portion of the pressure receiving member in parallel to the displacement direction of the pressure receiving member, and in which an end portion thereof is bent toward a central portion of the pressure receiving member; and a pressure sensing device which has a pressure sensing portion and first and second base portions respectively connected to both ends of the pressure sensing portion. The supporting member includes two or more members which are formed of different materials and connected in the displacement direction, and the proportion of the lengths of the two or more members is adjusted so that the supporting member has the same thermal expansion coefficient as the pressure sensing device.
A pressure sensor comprising:
A pressure sensor comprising:
Dependencies are inferred from the claim text.