Ceramic component having at least one electrical feedthrough, method for its manufacture and pressure sensor with such a component
AssigneeEndress + Hauser GmbH + Co. KG
InventorUlfert Drewes
Life of this patent
Estimating the term…
Abstract
A ceramic component having at least one electrical feedthrough, comprising: a ceramic body, through which a bore extends; and a metal conductor, which is arranged at least sectionally in the bore and which is secured in the bore by means of an active hard solder, or braze, whereby the bore is sealed. The active hard solder fills an annular gap between the metal conductor and the ceramic body, characterized in that the active hard solder has a radially variable, chemical composition.
Claims10
1-9. (canceled)
A ceramic component having at least one electrical feedthrough, comprising:
- a ceramic body, through which a bore extends;
- and
- a metal conductor, which is arranged at least sectionally in said bore and which is secured in said bore by means of an active hard solder, or braze, whereby the bore is sealed, wherein:
- said active hard solder fills an annular gap between the metal conductor and the ceramic body;
- characterized in that the active hard solder has a radially variable, chemical composition.
A pressure sensor, comprising:
- a platform having a ceramic component;
- a ceramic body, through which a bore extends;
- and
- a metal conductor, which is arranged at least sectionally in said bore and which is secured in said bore by means of an active hard solder, or braze, whereby the bore is sealed, wherein:
- said active hard solder fills an annular gap between the metal conductor and the ceramic body;
- characterized in that the active hard solder has a radially variable, chemical composition;
- a measuring membrane, which is joined with said platform along a perimetral edge by means of an active hard solder;
- and
- an electrical transducer for transducing a pressure dependent deformation of said measuring membrane into an electrical signal, wherein:
- said electrical transducer is contacted via at least one electrical feedthrough.
A method for manufacturing a ceramic component having at least one electrical feedthrough, comprising:
- providing a ceramic body, through which a bore extends;
- coating a metal conductor with an active braze;
- introducing the coated metal conductor into the bore;
- and
- securing the conductor in the bore, with sealing of the bore, by means of a vacuum soldering process, wherein:
- the coating of the conductor occurs in a sputter process;
- and
- the coating has a radially variable, chemical composition.
Dependencies are inferred from the claim text.