Microgyroscope for Determining Rotational Motions about At Least One of Three Perpendicular Spatial Axes

A microgyroscope for determining rotational motions about at least one of three perpendicular spatial axes x, y, and z, comprising:

• a substrate on which a plurality of masses are situated, the plurality of masses oscillating in parallel to a plane of the substrate in an x-y plane, a subset of oscillating masses in the plurality of masses being attached to the substrate by springs and anchoring;
• drive elements for maintaining the oscillating vibrations for the plurality of masses which are subjected to Coriolis force when the substrate rotates about one of the three perpendicular spatial axes x, y, and z;
• sensor elements for detecting at least one deflection of the plurality of masses due to the Coriolis force;
• wherein a central anchoring is situated on the substrate, and the plurality of masses are arranged around the central anchoring;
• wherein the subset of oscillating masses further comprises at least one mass selected from x masses and y masses, the x masses being deflectable along the z axis perpendicular to the substrate to detect yaw rates about the x axis, the y masses being also deflectable along the z axis perpendicular to the substrate to detect yaw rates about the y axis;
• wherein the plurality of masses further comprises z masses, and the z masses are deflectable in the x-y plane, that is perpendicular to their respective drive direction to detect yaw rates about the z axis;
• wherein the x and y masses are coupled to the central anchoring, and the z masses are coupled to at least one of the x masses and y masses;
• and
• wherein the x and y masses are supported on the substrate such that they are linearly and tangentially drivable about the central anchoring.