Chuck assembly back side reticle cleaner

Abstract

An improved technique for fixedly holding a reticle in a reticle chuck of the reticle simplifies the process of cleaning the back surface of the reticle by exposing the entire back surface. The technique includes approaching the reticle chuck with the reticle held at an initial orientation, aligning the reticle chuck with the initial orientation of the reticle and positioning the front surface of the reticle slightly below the top of a receiving area in the reticle chuck. The technique also includes placing a downward force on a set of spring-loaded pins, each spring-loaded pin configured to move within a corresponding hole in the chuck, the downward force providing a clearance for the reticle to enter a receiving cavity. The technique further includes aligning a centerline of the reticle in the receiving cavity with a centerline of the reticle chuck, simultaneously, and in unison, moving the reticle and the reticle chuck in a downward direction and supporting the reticle with the spring-loaded pins within the chuck.

Dependencies are inferred from the claim text.