Pattern transfer device and pattern transfer method
AssigneeSamsung Electronics Co., Ltd.
InventorsMin-Uk KIM, Gug-Rae JO, Joo-Han BAE
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Abstract
Exemplary embodiments of the present invention disclose a pattern transfer device and a pattern transfer method. The pattern transfer device may include a printing plate stage to load a printing plate having a pattern of a predetermined shape, and a substrate stage to load a substrate on which the pattern formed on the printing plate is to be printed. The pattern transfer device also includes a pressure unit configured with the printing plate stage to apply pressure to the printing plate, and a printing unit to transfer the pattern formed on the printing plate to the substrate.
Claims21
A pattern transfer device, comprising:
- a printing plate stage on which a printing plate comprising a pattern is disposed;
- a substrate stage on which a substrate is disposed, the pattern formed on the printing plate is to be printed on the substrate;
- a pressure unit to apply pressure to the printing plate, the pressure unit being disposed on the printing plate stage;
- and
- a printing unit to transfer the pattern formed on the printing plate to the substrate.
A pattern transfer method, comprising:
- disposing a printing plate on a printing plate stage, the printing plate comprising a pattern;
- measuring a flatness of the printing plate disposed on the printing plate stage;
- changing, by using a pressure unit, the flatness of the printing plate by applying pressure to the printing plate disposed on the printing plate stage;
- and
- transferring, to a substrate, the pattern formed on the printing plate having a changed flatness.
A pattern transfer device, comprising:
- a printing plate stage on which a printing plate comprising a pattern is disposed;
- a substrate stage on which a substrate is disposed, the pattern formed on the printing plate is to be printed on the substrate;
- a pressure unit to apply pressure to the substrate, the pressure unit being disposed on the substrate stage;
- and
- a printing unit to transfer the pattern formed on the printing plate to the substrate.
Dependencies are inferred from the claim text.