Implementing sequential segmented interleaving algorithm for enhanced process control

An apparatus for implementing Advanced Process Control (APC) of a fabrication tool for enhanced magnetic properties process output control comprising:

• a fabrication process tool controller implementing a sequential segmented interleaving algorithm with two tuning equations running in parallel;
• and
• said fabrication process tool controller calculating a deposition time after a production run based upon a relationship between a magnetic properties process output and deposition time process input;
• said fabrication process tool controller calculating a deposition rate offset value after a calibration run based upon the relationship between a calibration deposition thickness process output and an updated deposition time process input calculated after a last production run.

A system for implementing Advanced Process Control (APC) of a fabrication tool for enhanced electrical, magnetic, or physical properties process output control comprising:

• a processor;
• a control code stored on a computer readable medium, said control code including a sequential segmented interleaving algorithm with two tuning equations running in parallel;
• a fabrication process tool controller implementing said sequential segmented interleaving algorithm with two tuning equations running in parallel;
• and
• said fabrication process tool controller calculating a deposition time after a production run based upon a relationship between an electrical, magnetic, or physical properties process output and deposition time process input;
• said fabrication process tool controller calculating a deposition rate offset value after a calibration run based upon the relationship between a calibration deposition thickness process output and an updated deposition time process input calculated after a last production run.