Near field optical microscope
AssigneeNeaspec GmbH
InventorNenad Ocelic
Life of this patent
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Abstract
The invention relates to a device for conducting near-field optical measurements of a specimen, a method for conducting near-field optical measurements and the use of the device.
Claims14
A device for the near-field optical measurement of a specimen comprising a probe, a primary mirror (10), which is a concave mirror, and at least two secondary mirror(s) (30), wherein each one of the secondary mirrors (30) is located in an independent optical pathway, whereby each one independent optical pathway starts at the probe and passes the primary mirror (10) and the secondary mirror (30), each one of the secondary mirrors (30) is the first mirror located in the respective independent optical pathway downwards the primary mirror (10), whereby the optical pathways start at the probe and pass the primary mirror (10), and the secondary mirrors (30) are arranged such that the parts of different independent optical pathways that are located downwards the secondary mirrors (30) are not parallel to each other, whereby the independent optical pathways start at the probe and pass the primary mirror (10) and the respective secondary mirror (30).
A device for the near-field optical measurement of a specimen comprising a probe, a primary mirror (10), which is a concave mirror, and one or more secondary mirror(s) (30), wherein each one of the secondary mirrors (30) is located in an independent optical pathway, whereby each one independent optical pathway starts at the probe and passes the primary mirror (10) and the secondary mirror (30), each one of the secondary mirrors (30) is the first mirror located in the respective independent optical pathway downwards the primary mirror (10), whereby the optical pathways start at the probe and pass the primary mirror (10), and at least one of the secondary mirrors (30) is arranged such that the distance of the edge of the secondary mirror (32) to the probe is less or equal to about half the focal distance of the primary mirror (10).
(canceled)
Dependencies are inferred from the claim text.