Resonator
AssigneeNXP B.V.
InventorRobert J. P. Lander
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Abstract
A method of manufacturing a MEMS resonator formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator. The method includes the steps of forming the resonator from the first material; applying the second material to the resonator; and controlling the quantity of the second material applied to the resonator by the geometry of the resonator.
Claims12
A method of manufacturing a MEMS resonator formed from a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator, the method comprising the steps of:
- forming the resonator from the first material;
- applying the second material to the resonator;
- and
- controlling a quantity of the second material applied to the resonator by a geometry of the resonator.
A resonator comprising:
- a first material having a first Young's modulus and a first temperature coefficient of the first Young's modulus;
- a second material having a second Young's modulus and a second temperature coefficient of the second Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient at least within operating conditions of the resonator;
- a beam region;
- and
- a mass region,
- wherein the mass region includes a controller for controlling an amount of the second material in the mass region.
Dependencies are inferred from the claim text.