Forced-fluid switch
AssigneeMRL Industries, Inc.
InventorKevin B. PECK
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AssigneeMRL Industries, Inc.
InventorKevin B. PECK
Estimating the term…
A forced fluid switch including a first plenum in communication with a first port; a second plenum in communication with a second port; a third plenum in switched communication with the first plenum and the second plenum and in communication with a third port; a fourth plenum in switched communication with the first plenum and the second plenum and in communication with a fourth port; and wherein the forced fluid switch has at least a first forced fluid path and a second forced fluid path, wherein in the first forced fluid path, the third plenum is in communication with the first plenum and the fourth plenum is in communication with the second plenum, and wherein in the second forced fluid path, the third plenum is in communication with the second plenum and the fourth plenum is in communication with the first plenum. A method is provided for switching forced fluid.
A forced fluid switch, comprising:
A method of switching forced fluid from a first forced fluid path to a second forced fluid path, comprising:
A method of exchanging heat with a forced-fluid process chamber, comprising:
Dependencies are inferred from the claim text.