Method for producing a matrix of individual electronic components and matrix produced thereby
AssigneeCommissariat a l'Energie Atomique
InventorsFrancois Marion, Olivier Gravrand
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AssigneeCommissariat a l'Energie Atomique
InventorsFrancois Marion, Olivier Gravrand
Estimating the term…
The invention relates to a method for producing a matrix of electronic components, comprising a step of producing an active layer on a substrate, and a step of individualizing the components by forming trenches in the active layer at least until the substrate emerges. The method comprises steps of depositing a layer of functional material on the active layer, depositing a photosensitive resin on the layer of material in such a way as to fill said trenches and to form a thin film on the upper face of the components, at least partially exposing the resin to radiation while underexposing the portion of resin in the trenches, developing the resin in such a way as to remove the properly exposed portion thereof, removing the functional material layer portion that shows through after the development step, and removing the remaining portion of resin.
A method for producing a matrix of individual electronic components comprising a step of producing an active layer on a substrate base, particularly by epitaxy, and a step of individualizing said components by forming trenches, particularly by etching, in the active layer, said individualization step leading to reveal at least the substrate base, further comprising the steps of:
Dependencies are inferred from the claim text.