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US 2011/0300338 A1Published application
Graphene nano ribbons and methods of preparing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsHyeon-jin Shin, Jae-young Choi, Young-hee Lee, Gang-hee Han
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Abstract
Methods of preparing graphene nano ribbons may include forming a graphene sheet on at least one surface of a substrate, forming a plasma mask having a nano pattern on the graphene sheet, and forming a nano pattern on the graphene sheet by plasma treating a stack structure on which the plasma mask is formed.
Claims20
A method of preparing a graphene nano ribbon, the method comprising:
- depositing a graphene sheet on at least one surface of a substrate;
- forming a plasma mask with a nano pattern on the graphene sheet;
- and
- forming a nano pattern in the graphene sheet by plasma treating a stack structure including the plasma mask.
1 more element
A method of preparing a graphene nano ribbon, the method comprising:
- plasma treating a graphene sheet including at least one graphene layer to form a graphene pattern.
Dependencies are inferred from the claim text.