Trichlorosilane Vaporization System

A method of vaporizing a liquid, the method comprising:

• initiating a flow of the liquid into an inlet of a tube in a heat exchanger, the tube including spherical members;
• heating the tube in the heat exchanger;
• vaporizing the liquid into a gas by passing the liquid through the tube, wherein the spherical members are heated by a heat source and wherein the spherical members transfer heat to the liquid as the liquid passes through a plurality of voids defined between the spherical members and the tube;
• and
• removing the gas from the heat exchanger.

A method of vaporizing liquid trichlorosilane, the method comprising:

• initiating a flow of liquid trichlorosilane into an inlet of a first heat exchanger;
• partially vaporizing the liquid trichlorosilane into a gas state by passing the trichlorosilane through a first tube having a plurality of non-reactive members in the first heat exchanger, wherein the non-reactive members are heated by a first heat source and wherein the non-reactive members transfer heat to the trichlorosilane as the trichlorosilane passes through the non-reactive members;
• removing the partially vaporized trichlorosilane from the first heat exchanger;
• mixing the partially vaporized trichlorosilane with a first gas, resulting in a mixture of partially vaporized trichlorosilane and the first gas;
• initiating a flow of the mixture of partially vaporized trichlorosilane and the first gas into a second tube in a second heat exchanger, the second tube including non-reactive members;
• vaporizing the mixture of partially vaporized trichlorosilane and the first gas by passing the mixture through the second tube, wherein the non-reactive members are heated by a second heat source and wherein the non-reactive members transfers heat to mixture as the mixture passes through the non-reactive members;
• and
• removing the mixture of vaporized trichlorosilane and first gas from the second heat exchanger.