Method for removing impurities from gas flows comprising oxygen
AssigneeLinde Aktiengesellschaft
InventorsNicole Schodel, Hans Zander, Florian Winkler, Roland Ritter, Torsten Stoffregen
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Abstract
A process for removing impurities, in particular oxides of sulphur (SOx) and/or oxides of nitrogen (NOx) from oxygen-containing gas streams by scrubbing with at least one washing agent is described. In order to achieve effective gas purification in an economical manner even in the case of so-called large “oxyfuel” furnaces which operate with oxygen as fuel gas, it is proposed to convert the impurities at an elevated pressure of at least 2 bar with at least one basic constituent of the washing agent into salts and to wash out said impurities as dissolved salts.
Claims18
Process of providing a layer on an electronic device or a component thereof, comprising the step of exposing the electronic device or the component to a beam of particles of low energy, thereby depositing a layer of said particles on the electronic device or component.
Dependencies are inferred from the claim text.