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US 2011/0299842 A1Published application
Optical image stabilizer and method of manufacturing the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorSeung Seoup Lee
Life of this patent
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Abstract
Disclosed herein is an optical image stabilizer, including: a substrate; a table disposed over the substrate, while levitating, to be movable on the substrate and having an image sensor mounted on the upper end of the substrate; cantilever arms disposed over the substrate, while levitating, and connected to the table to move the table; anchors fixing one ends of the cantilever arms onto the substrate; and electrodes applying voltage for moving the cantilever arm.
Claims14
An optical image stabilizer, comprising:
- a substrate;
- a table disposed over the substrate, while levitating, to be movable on the substrate and having an image sensor mounted on the upper end of the substrate;
- cantilever arms disposed over the substrate, while levitating, and connected to the table to move the table;
- anchors fixing one ends of the cantilever arms onto the substrate;
- and
- electrodes applying voltage for moving the cantilever arms.
3 more elements
A method of manufacturing an optical image stabilizer, comprising:
- providing an SOI substrate that includes first and second silicon each provided on the upper surface and the lower surface of the substrate, having an insulator layer therebetween;
- forming a table, a cantilever arm connected to the table, an anchor connected to the cantilever arm, and an electrode opposite to the cantilever arm by etching the first silicon;
- allowing the table and the cantilever arm to levitate from the second silicon by removing an insulator layer disposed under the table and the cantilever arm;
- and
- mounting an image sensor on the table.
2 more elements
Dependencies are inferred from the claim text.