Optical Waveguide and Optical Waveguide Module
OwnerYasunobu Matsuoka, Toshiki Sugawarainventors
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Abstract
An optical waveguide module which satisfies highly-accurate and stable optical connection between optical elements and optical waveguides and can be easily fabricated is provided. As means for it, in an optical waveguide module having: an optical waveguide surrounded by a cladding layer and provided with a mirror part formed of a tapered surface on a first end side; an optical element having a concave part in a first surface of a semiconductor substrate; and a convex member provided on the cladding layer so as to be planarly overlapped with the mirror part, the convex member is mated with the concave part of the optical element.
Claims19
An optical waveguide having a core layer surrounded by a cladding layer, provided with a mirror part formed of a tapered surface on a first end side, and transmitting light when an optical element is mounted, the optical waveguide comprising:
- a convex member provided on the cladding layer so as to be planarly overlapped with the mirror part,
- wherein the convex member has a shape capable of being mated with a concave part of an optical element when the optical element having the concave part is mounted on a first surface of a semiconductor substrate.
An optical waveguide module comprising:
- an optical waveguide surrounded by a cladding layer and provided with a mirror part formed of a tapered surface on a first end side;
- an optical element having a concave part in a first surface of a semiconductor substrate;
- and
- a convex member provided on the cladding layer so as to be planarly overlapped with the mirror part, wherein the convex member is mated with the concave part of the optical element.
An optical waveguide module comprising:
- a plurality of optical waveguides each surrounded by a cladding layer and provided with a mirror part formed of a tapered surface on a first end side, the optical waveguides being disposed in parallel to each other;
- an optical element array having a plurality of optical elements each having concave parts in a first surface of a semiconductor substrate and formed on the semiconductor substrate so as to correspond to the mirror parts of the plurality of optical waveguides;
- and
- two convex members provided on the cladding layer so as to be planarly overlapped with each of the mirror parts of at least two of the optical waveguides among the plurality of optical waveguides,
- wherein the two convex members are mated with the concave parts of the at least two optical elements among the plurality of optical elements.
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Dependencies are inferred from the claim text.