Miniature micro-electromechanical system (mems) based directional sound sensor
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorsGamani KARUNASIRI, Jose SINIBALDI
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Abstract
A micro-electromechanical (MEMS) based directional sound sensor includes a two sensor wings attached to a surrounding support structure by two legs. The support structure is hollow beneath the sensor wings allowing the sensor wings to vibrate in response to sound excitation. In one embodiment, interdigitated comb finger capacitors attached on the sensor wing edges and the support structure enable an electrostatic (capacitive) readout related to the vibrations of the sensor which allows determination of the sound direction.
Claims13
A micro-electromechanical system (MEMS) based directional sound sensor comprising:
- a sensor body, the sensor body comprising:
- a first sensor wing;
- a second sensor wing;
- a bridge coupling said first sensor wing with said second sensor wing;
- a first leg connected to said bridge;
- and
- a second leg connected to said bridge;
- and
- a support structure, said support structure connected to said sensor body, wherein said support structure is hollow beneath said sensor body, allowing said sensor body to vibrate upon sound excitation.
A directional sound sensor device comprising:
- a first MEMS based directional sound sensor;
- and
- a second MEMS based directional sound sensor.
A method for forming a micro-electromechanical system (MEMS) based directional sound sensor comprising:
- obtaining a silicon on insulator (SOI) support structure;
- forming a sensor body from said SOI substrate, said sensor body comprising:
- a first sensor wing;
- a second sensor wing;
- a bridge coupling said first sensor wing with said second sensor wing;
- a first leg connected to said bridge;
- and
- a second leg connected to said bridge;
- forming a support structure from said SOI substrate, wherein said support structure is connected to said sensor body at said first leg and said second leg, and further wherein said support structure is hollow beneath said sensor body allowing said sensor body to vibrate in response to sound excitation;
- and
- forming electrically conductive paths on said sensor body and said support structure.
Dependencies are inferred from the claim text.