Filter device for the compensation of an asymmetric pupil illumination
AssigneeCarl Zeiss SMT GmbH
InventorsManfred Maul, Damian Fiolka
Life of this patent
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Abstract
The invention relates to a filter device for an illumination system, especially for the correction of the illumination of the illuminating pupil, including a light source, with the illumination system being passed through by a bundle of illuminating rays from the light source to an object plane, with the bundle of illuminating rays impinging upon the filter device, including at least one filter element which can be introduced into the beam path of the bundle of illuminating rays, with the filter element including an actuating device, so that the filter element can be brought with the help of the actuating device into the bundle of illuminating rays.
Claims2
A filter device for an illumination system, especially for a correction of an illumination of a illuminated pupil, wherein the illumination system comprises a light source, and a bundle of illuminating rays propagating from the light source to an object plane, wherein the bundle of illuminating rays propagating through the illumination system along an beam path are impinging upon the filter device;
- comprising:
- at least one filter element which can be introduced into the beam path of the bundle of illuminating rays, wherein the filter element comprises an actuating device, so that the filter element can be brought with the aid of the actuating device to different positions within the bundle of illuminating rays.
-28. (canceled)
Dependencies are inferred from the claim text.