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US 2011/0299064 A1Published application
Deformation measuring apparatus and deformation measuring method
AssigneeCanon Kabushiki Kaisha
InventorTakashi Sugimoto
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AssigneeCanon Kabushiki Kaisha
InventorTakashi Sugimoto
Estimating the term…
An apparatus and a method capable of measuring large deformation with a high accuracy and dynamically, using speckle interference, utilizes an optical path where one laser beam out of two laser beams becomes non-collimated light and a plane parallel transparent plate, and can form carrier fringes. More specifically, the transparent plate is arranged on the optical path where the non-collimated light is formed, or is removed from the optical path, or a refractive index, or a thickness of the transparent plate arranged on the optical path, or a tilt angle relative to an optical axis is changed. The phase analysis can be performed from fringe images corresponding to the deformation, by performing repetitively the above-described processing and acquisition of the speckle interference pattern.
A method for measuring, from an amount of phase change of an interference pattern generated by irradiating an object to be measured with light, an amount of deformation of the object, the method comprising:
An apparatus that measures, from an amount of phase change of interference pattern generated by irradiating an object to be measured with light, an amount of deformation of the object, the apparatus comprising:
Dependencies are inferred from the claim text.