Optical device having a deformable optical element
AssigneeCarl Zeiss SMT GmbH
InventorsManfred Steinbach, Armin Schoeppach
Life of this patent
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Abstract
The disclosure relates to an optical device, in particular for microlithography. The optical device includes an optical module and a support structure that supports the optical module. The optical module includes an optical element and a holding device that holds the optical element. The holding device includes a deformation device having a plurality of active deformation units which contact the optical element and which are designed so as to impose a pre-defined deformation on the optical element. The optical module is fixed to the support structure in a replaceable manner.
Claims20
An optical device, comprising:
- an optical module, comprising:
- an optical element;
- and
- a holding device holding the optical element, the holding device comprising:
- a deformation device comprising a plurality of active deformation units which contact the optical element, the plurality of active deformation units being configured to impose a deformation on the optical element via a deformation force in a deformation force direction;
- and
- a positioning device comprising an active positioning unit which contacts the optical element, the active positioning unit being designed to adjust the position and/or the orientation of the optical element;
- and
- a support structure supporting the optical module,
- wherein:
- an active deformation unit comprises an actuator unit configured to generate the deformation force;
- the actuator unit is configured to generate a force or a momentum in an actuation direction;
- a transmission element is configured so that, during use of the optical device when a force flux is present between the actuator unit and the optical element, the transmission element is in the force flux;
- the transmission element has a rigidity in the actuation direction which is at most 0.1% of a rigidity of the actuator unit in the actuation direction;
- and
- the optical device is configured to be used in microlithography.
An optical device for microlithography, comprising:
- an optical element;
- and
- a holding device, comprising:
- a holding structure that supports the optical module;
- a deformation device comprising a plurality of active deformation units which contact the optical element, the plurality of active deformation units being designed to impose a pre-defined deformation on the optical element;
- and
- a separate abutment structure fixed to the holding structure in a detachable manner,
- wherein a deformation unit is supported on the abutment structure, and the optical device is configured to be use in microlithography.
Dependencies are inferred from the claim text.