Pattern inspecting apparatus and pattern inspecting method
OwnerTakashi Hiroi, Takeyuki Yoshida +1inventors
InventorsTakashi Hiroi, Takeyuki Yoshida, Masaaki Nojiri
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Abstract
In conventional methods, efficient analyses with respect to detected defects were not given consideration. A detected image is matched against pre-obtained partial images of a normal part and a defect part to determine a defect in the detected image. Then, the partial images and the detected image are synthesized to generate a review image in which the identifiability of the detected image is improved. Thus, the operator is able to readily make a determination with respect to the detected defect.
Claims12
1-8. (canceled)
A pattern inspecting apparatus, comprising:
- an image detection part that obtains an image of a pattern that a unit under inspection has;
- a model database part that stores a pre-generated model image of a normal part or a defect part;
- a defect determination part that matches a detected image obtained at the image detection part against the model image, and that determines a defect in the detected image based on a matching result;
- an image generation part that generates an image based on a determination result of the defect determination part by synthesizing the model image with the detected image, or by replacing a portion of the detected image with the model image;
- and
- a display part that displays the image generated through synthesis or replacement.
A pattern inspecting method, comprising:
- obtaining a detected image of a pattern that a unit under inspection has;
- matching the detected image against an image generated from the detected image, and determining a defect in the detected image based on a matching result;
- generating, based on a determination result, an image by synthesizing the image generated from the detected image with the detected image, or by replacing a portion of the detected mage with the image generated from the detected image;
- and
- displaying the image generated through synthesis or replacement.
A pattern inspecting method according to claim 13, wherein the image to be displayed on the display screen is generated through image synthesis of the detected image with a model image of a normal part or defect part corresponding to the detected image, or through image morphing in which a morphing method is applied to the detected image and the model image of the normal part or defect part corresponding to the detected image, or through a replacement process with a pre-obtained high image quality model image.
A pattern inspecting apparatus, comprising:
- an image detection part that obtains an image of a pattern that a unit under inspection has;
- a defect determination part that matches an image generated from a detected image obtained at the image detection part against the detected image, and that determines a defect in the detected image based on a matching result;
- an image generation part that generates an image based on a determination result of the defect determination part by synthesizing the image generated from the detected image with the detected image, or by replacing a portion of the detected image with the image generated from the detected image;
- and
- a display part that displays the image generated through synthesis or replacement.
A pattern inspecting method, comprising:
- obtaining an inspection image of a pattern that a unit under inspection has;
- matching the obtained detected image against pre-registered model images corresponding to a normal part and a defect part, and determining a defect in the obtained detected image based on a matching result;
- generating an image based on a determination result by synthesizing the model images with the detected image, or by replacing a portion of the detected image with the model images;
- and
- displaying the image generated through synthesis or replacement on a display image.
Dependencies are inferred from the claim text.