Memory cell
AssigneeNXP B.V.
InventorsJohan Dick Boter, Guoqiao Tao, Guido Jozef Maria Dormans, Joachim Christoph Hans Garbe
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Abstract
A non-volatile memory cell (200) comprising a floating gate transistor (206) comprising a floating gate (10) positioned between a control gate (14) and a first channel region (232) and an access gate transistor (208) comprising an access gate (22) and a second channel region (234), the first channel region (232) comprising a first implant (242) with a first dosage level (234), and the second channel region comprising a second implant (244) having a second dosage level, the first dosage level being less than the second dosage level.
Claims12
A non-volatile memory cell comprising a floating gate transistor comprising a floating gate positioned between a control gate and a first channel region and an access gate transistor comprising an access gate and a second channel region, the first channel region comprising a first implant with a first dosage level, and the second channel region comprising a second implant having a second dosage level, the first dosage level being less than the second dosage level, wherein the first dosage level is in the range of 0 to 5e11 cm−2.
(canceled)
A method of fabricating a non volatile memory cell comprising a floating gate transistor comprising floating gate positioned between a control gate and a first channel region, and an access gate transistor comprising an access gate and a second channel region, the first channel region comprising a first implant having a first dosage level, and the second channel region comprising a second implant having a second dosage level, the first dosage level being less than the second dosage level, the method comprising the steps of implanting ions into a substrate at a first dosage level within the range of 0 to 5e11 cm−2;
- masking the substrate to form a masked part and an unmasked part;
- implanting further ions into the unmasked part to form a region in the substrate having a second dosage level of ions, the second dosage level being higher than the first dosage level to thereby form first and second implants.
Dependencies are inferred from the claim text.