Select devices including an open volume, memory devices and systems including same, and methods for forming same
AssigneeMicron Technology, Inc.
InventorsBhaskar Srinivasan, Gurtej S. Sandhu
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Abstract
Select devices including an open volume that functions as a high bandgap material having a low dielectric constant are disclosed. The open volume may provide a more nonlinear, asymmetric I-V curve and enhanced rectifying behavior in the select devices. The select devices may comprise, for example, a metal-insulator-insulator-metal (MIIM) diode. Various methods may be used to form select devices and memory systems including such select devices. Memory devices and electronic systems include such select devices.
Claims21
A method of forming a select device, comprising:
- forming at least one structure comprising a first conductive material overlying a first dielectric material and a second dielectric material, the at least one structure extending from a surface of a second conductive material underlying the second dielectric material;
- removing a portion of the second dielectric material underlying the first dielectric material selective to a plurality of nanodots dispersed within the second dielectric material to form an open volume between opposing surfaces of the first dielectric material and the second conductive material;
- and
- forming spacers over sidewalls of the at least one structure.
A select device comprising:
- a dielectric material overlying a conductive material;
- another conductive material overlying the dielectric material;
- and
- an open volume defined at least partially by a surface of the conductive material and an opposing surface of the dielectric material.
A memory device comprising:
- at least one memory element;
- a plurality of bit lines;
- at least one wordline;
- and
- at least one select device comprising:
- a conductive material;
- and
- a structure spaced apart from the conductive material by an open volume, the structure comprising another conductive material overlying a dielectric material.
An electronic system comprising:
- at least one electronic signal processor;
- at least one memory device configured to communicate electrically with the at least one electronic signal processor, the at least one memory device comprising at least one select device including a conductive material, another conductive material, a dielectric material disposed over a surface of the another conductive material opposing the conductive material, and an open volume extending between the dielectric material and the conductive material;
- and
- at least one of an input device and an output device configured to communicate electrically with the at least one electronic signal processor.
Dependencies are inferred from the claim text.