Oxide based memory
AssigneeMicron Technology, Inc.
InventorsD.V. Nirmal Ramaswamy, Gurtej S. Sandhu
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Abstract
Methods, devices, and systems associated with oxide based memory are described herein. In one or more embodiments, a method of forming an oxide based memory cell includes forming a first electrode, forming a tunnel barrier, wherein a first portion of the tunnel barrier includes a first material and a second portion of the tunnel barrier includes a second material, forming an oxygen source, and forming a second electrode.
Claims28
A method of forming an oxide based memory cell, comprising:
- forming a first electrode;
- forming a tunnel barrier, wherein a first portion of the tunnel barrier includes a first material and a second portion of the tunnel barrier includes a second material;
- forming an oxygen source;
- and
- forming a second electrode.
A method of forming an oxide based memory cell, comprising:
- forming a first electrode;
- forming a tunnel barrier, wherein the tunnel barrier includes a first material with a first activation energy for oxygen ion diffusion and a second material with a second activation energy for oxygen ion diffusion;
- forming an oxygen source;
- and
- forming a second electrode.
A method of fabricating a memory cell, comprising:
- forming a first electrode;
- forming a tunnel barrier over the first electrode, wherein the tunnel barrier is a graded tunnel barrier that includes a first material of aluminum oxide and a second material;
- forming an oxygen source over the tunnel barrier;
- and
- forming a second electrode over the oxygen source.
A memory cell, comprising:
- a first electrode;
- a tunnel barrier, wherein a first portion of the tunnel barrier includes a first material and a second portion of the tunnel barrier includes a second material;
- an oxygen source;
- and
- a second electrode.
A memory device, comprising:
- an array of memory cells;
- and
- circuitry for control and/or access of the array;
- where at least one memory cell of the array includes:
- a first electrode;
- a tunnel barrier, wherein a first portion of the tunnel barrier includes a first material and a second portion of the tunnel barrier includes a second material;
- an oxygen source;
- and
- a second electrode.
Dependencies are inferred from the claim text.