Effective algorithm for warming a twist axis for cold ion implantations

A method for warming a rotational interface in a chilled ion implantation environment, the method comprising:

• providing an ion implantation system configured to produce an ion beam;
• providing a workpiece scanning system configured to selectively pass a workpiece through the ion beam, wherein the workpiece scanning system comprises a scan arm configured to rotate about a first axis and an end effector rotatably coupled to the scan arm at a predetermined distance from the first axis, wherein the end effector is configured to selectively clamp the workpiece thereto, and wherein the end effector is configured to rotate about a second axis;
• chilling the end effector, wherein one or more of a bearing and a seal associated with the rotation of the end effector about the second axis are chilled, therein decreasing an ability of the end effector to rotate about the second axis;
• and
• rotating the scan arm about the first axis, wherein inertia of the end effector causes a rotation of the end effector about the second axis.

A workpiece scanning system for use in an ion implantation system, the workpiece scanning system, comprising:

• a scan arm configured to rotate about a first axis;
• an end effector rotatably coupled to the scan arm and configured to selectively secure a workpiece, wherein the end effector is further configured to rotate about a second axis, wherein the first axis and second axis are positioned a predetermined distance apart, and wherein the end effector comprises a clamping plate;
• a bearing positioned along the second axis, wherein the bearing rotatably couples the end effector to the scan arm;
• a seal positioned along the second axis, wherein the seal generally provides a pressure barrier between an external environment and an internal environment associated with an internal region of one or more of the scan arm and end effector;
• and
• a controller configured to selectively rotate and counter-rotate the end effector about the second axis based, at least in part, on feedback from a twist motor and a predetermined degree of rotation about the second axis, and wherein the controller is further configured to selectively reciprocate the scan arm about the first axis based, at least in part, on the feedback from the twist motor and/or a status of the ion implantation system, wherein selectively reciprocating the scan arm causes a rotation of the end effector about the second axis due to inertia.

An ion implantation workpiece scanning system, comprising:

• a scan arm configured to translate a workpiece across an ion beam;
• an end effector rotatably coupled to the scan arm and configured to selectively secure a workpiece, wherein the end effector is further configured to rotate about an twist axis;
• a bearing positioned along the twist axis, wherein the bearing rotatably couples the end effector to the scan arm;
• a seal positioned along the twist axis, wherein the seal generally provides a pressure barrier between an external environment and an internal environment associated with an internal region of one or more of the scan arm and end effector;
• and
• a controller configured to selectively provide a predetermined amount of heat to the bearing and seal via a selective rotation of the twist axis, therein increasing a propensity of the end effector to rotate about the twist axis.

A workpiece scanning system for use in an ion implantation system, the workpiece scanning system, comprising:

• a scan arm having an end effector rotatably coupled thereto via a first axis motor, said end effector being configured to selectively secure a work piece thereto, wherein the end effector is further configured to rotate relative to the scan arm about a first axis;
• a bearing associated with the first axis motor positioned along the first axis for rotatably coupling the end effector to the scan arm;
• a seal positioned along the first axis for providing a protective barrier for the bearing;
• and
• a controller configured to selectively rotate and counter-rotate the end effector about the first axis for maintaining the rotatable coupling between said scan arm and said end effector.

An ion implantation workpiece scanning system, comprising:

• a scan arm configured to translate a workpiece across an ion beam;
• an end effector rotatably coupled to the scan arm and configured to selectively secure a workpiece thereto, wherein the end effector is further configured to rotate about a first axis;
• a bearing positioned along the first axis, wherein the bearing rotatably couples the end effector to the scan arm;
• a seal positioned along the first axis for providing a protective barrier for the bearing;
• and
• a controller configured to selectively provide a predetermined amount of heat to the bearing and seal via a selective rotation of the end effector about the first axis, therein maintaining a minimum propensity of the end effector to rotate about the first axis.