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US 2011/0297651 A1Published application
Spatially chirped pulses for femtosecond laser ablation through transparent materials
AssigneeColorado School of Mines
InventorsJeffrey Squier, Dawn Vitek, David Kleinfeld, Daniel Adams, Charles Durfee
Life of this patent
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Abstract
Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (˜1 mm) features with parallel sidewalls are ablated at high material removal rates.
Claims20
An optical system, comprising:
- a first optical element or set of optical elements configured to receive temporally chirped pulses of light and then spatially chirp the received pulses of light;
- and
- a second optical element or set of optical elements configured to focus the light that is output by the first optical element or set of optical elements.
A method, comprising:
- receiving temporally chirped pulses of light;
- spatially chirping and collimating the temporally chirped pulses of light such that different frequencies of the spatially chirped and collimated light overlap in time;
- and
- focusing the frequencies of the spatially chirped and collimated light at a focal plane, wherein the different frequencies of the spatially chirped and collimated light only spatially overlap at the focal plane.
1 more element
An optical system for modifying properties of an object, the system comprising:
- a first set of optical elements configured to receive a first light input and produce a first light output, the first light input comprising temporally chirped pulses of light and the first light output comprising spatially chirped and collimated light with different frequencies overlapping in time, wherein the first set of optical elements comprises a single-pass, double grating configuration of optical elements which are used to spatially chirp and collimate the first light input;
- and
- a second optical element configured to receive the first light output and produce a second light output which focuses the different frequencies of the first light output at a focal plane for ablating at least one of glass and biological materials.
Dependencies are inferred from the claim text.