US 2011/0297643 A1Published application

Method of hydrophobizing and patterning frontside surface of integrated circuit

AssigneeSilverbrook Research Pty Ltd

InventorsGregory John McAvoy, Emma Rose Kerr, Kia Silverbrook

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Abstract

A method of hydrophobizing a frontside surface of an integrated circuit. The method includes the steps of: (a) depositing a hydrophobic polymeric layer onto the frontside surface; (b) depositing a protective metal film onto the hydrophobic polymeric layer; (c) depositing a sacrificial material onto the metal film; (d) patterning the sacrificial material; (e) etching through the metal film, the hydrophobic polymeric layer and the frontside surface; (f) performing MEMS processing steps on a backside of the integrated circuit; (g) subjecting the integrated circuit to an oxidizing plasma, wherein the metal film protects the hydrophobic polymeric layer from the oxidizing plasma; and (h) removing the protective metal film to provide an integrated circuit having a relatively hydrophobic patterned frontside surface.

Claims17

Dependent claims

A method of hydrophobizing and patterning a frontside surface of an integrated circuit, said method comprising the steps of:

(a) depositing a hydrophobic polymeric layer onto said frontside surface;
(b) depositing a protective metal film onto said hydrophobic polymeric layer;
(c) depositing a sacrificial material onto said metal film;
(d) patterning said sacrificial material;
(e) etching through said metal film, said hydrophobic polymeric layer and said frontside surface, thereby patterning said frontside surface;
(f) performing MEMS processing steps on a backside of said integrated circuit;
(g) subjecting said integrated circuit to an oxidizing plasma, wherein said metal film protects said hydrophobic polymeric layer from said oxidizing plasma;
and
(h) removing said protective metal film, thereby providing an integrated circuit having a relatively hydrophobic patterned frontside surface.

6 more elements

Dependencies are inferred from the claim text.