Method For Forming Thin Film And Apparatus Therefor

A solar cell production apparatus, comprising:

• a chamber equipped with an inlet port configured to introduce a source gas and an exhaust port for evacuation;
• one or more array antennas placed in the chamber, each of the said array antennas includes a plurality of antenna elements, each of the antenna elements having a first and a second conductors, a first end of the first linear conductor and a first end of the second linear conductor of said antenna elements being electrically connected to each other, the first and the second linear conductors placed alternately in a plane in equal intervals, the second ends of each of the first linear conductors connected to a high-frequency power source and the second ends of each of the second linear conductors being grounded;
• and
• a plurality of substrate holders configured to support a plurality of substrates on both sides of and in parallel to said array antennas so as to have respective distances between the array antennas and the substrates about equal to the intervals.