Micromechanical system
AssigneeRobert Bosch GmbH
InventorJochen Reinmuth
Life of this patent
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Abstract
In a micromechanical system having a substrate and an electrode situated over the substrate, the electrode is connected to the substrate via a vertical spring. The vertical spring is sectionally provided in a first conductive layer and sectionally provided in a second conductive layer, the second conductive layer being situated over the first conductive layer and the first conductive layer being situated over the substrate. The electrode is provided in a third conductive layer, which is situated over the second conductive layer.
Claims10
A micromechanical system, comprising:
- a substrate;
- an electrode situated over the substrate;
- and
- a vertical spring, wherein the electrode is connected to the substrate via the vertical spring;
- wherein a first portion of the vertical spring is sectionally provided in a first conductive layer and a second portion of the vertical spring is sectionally provided in a second conductive layer, the second conductive layer being situated over the first conductive layer, and the first conductive layer being situated over the substrate, and wherein the electrode is provided in a third conductive layer situated over the second conductive layer.
A method for manufacturing a micromechanical system having an electrode situated over a substrate, comprising:
- depositing a first insulation layer on the substrate;
- depositing and structuring a first conductive layer to create a base of a vertical spring;
- depositing and structuring a second insulation layer;
- depositing and structuring a second conductive layer to create at least one spring arm of the vertical spring;
- depositing and structuring a third insulation layer;
- depositing and structuring a third conductive layer to create the electrode, which is connected to the substrate via the vertical spring;
- and
- removing a part of the first insulation layer, the second insulation layer, and the third insulation layer.
Dependencies are inferred from the claim text.