Multi-axis capacitive accelerometer
OwnerBin YANG, Yi-Lin Yaninventors
Life of this patent
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Abstract
A accelerometer includes a base, a pair of fixed sensing blocks anchored to the base, a plurality of elastic linkages connected to the base, and a movable sensing block sandwiched between the pair of fixed sensing blocks and suspended in the base by the elastic linkages for moving either along a first or a second axes or shifting along a third axes. Each fixed sensing block defines four fixed sensing sections and each fixed sensing section sets in space with respect to the other fixed sensing sections. A projection of each fixed sensing section along a third axes exceeds the movable sensing block in a direction of the first and second axis, respectively.
Claims10
A multi-axis capacitive accelerometer comprising:
- a base;
- a pair of fixed sensing blocks anchored to the base, each fixed sensing block defining a plurality of fixed sensing sections and an upper surface;
- a plurality of elastic linkages connected to the base;
- a movable sensing block sandwiched between the pair of fixed sensing blocks for forming a plurality of capacitive structures together with each corresponding fixed sensing section and suspended in the base by the elastic linkages for being capable of moving either along a first axes parallel to the upper surface of each fixed sensing block or a second axes perpendicular to the first axes and parallel to the upper surface of each fixed sensing block or shifting along a third axes perpendicular to the first and second axis, respectively;
- wherein, each fixed sensing section is located adjacent a corner of the base and is isolative to each other;
- a projection of each fixed sensing section along a third axes exceeds the movable sensing block in a direction along the first and second axis, respectively.
A multi-axis capacitive accelerometer, comprising:
- a frame;
- an upper fixed sensing block connected to the frame;
- a lower fixed sensing block connected to the frame and parallel to the upper fixed sensing block;
- a movable sensing block located between and parallel to the upper fixed sensing block and the lower fixed sensing block, the movable sensing block being connected to the frame by a plurality of elastic linkages;
- each of the upper and lower fixed sensing blocks defining a plurality of fixed sensing sections arranged in rows and columns;
- wherein, a overlapping area between the fixed sensing sections in one row and the movable sensing block is increased and a overlapping area between the fixed sensing blocks in another row and the movable sensing block is reduced when the movable sensing block moves along a direction perpendicular to the row;
- and
- wherein a overlapping area between the fixed sensing sections in one column and the movable sensing block is increased and a overlapping area between the fixed sensing blocks in another column and the movable sensing block is reduced when the movable sensing block moves along a direction parallel to the row;
- and
- wherein a distance between the movable sensing block and one of the upper fixed sensing block and the lower fixed sensing block is increased and a distance between the movable sensing block and the other of the upper fixed sensing block and the lower fixed sensing block is reduced when the movable moves along a direction perpendicular to both of the row and the column.
Dependencies are inferred from the claim text.