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US 2011/0296900 A1Published application
Integrated IR Source and Acoustic Detector for Photoacoustic Gas Sensor
AssigneeHoneywell International Inc.
InventorWalter Thorson
Life of this patent
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Abstract
A photoacoustic gas detector includes an integrated source, infrared filter and an acoustic sensor. The source, filter and acoustic sensor can be integrated onto one or more semiconductor substrates, such as silicon. Processing circuitry can also be integrated onto the substrate. Further, the source, filter and acoustic sensor can be integrated into a single component package, such as a metal can transistor package.
Claims21
A photoacoustic gas sensor component comprising:
- an infrared source carried on a semiconductor substrate;
- an integrated microphone formed on one of, the same or a second semiconductor substrate, and an infrared wavelength selective bandpass filter carried on a third substrate.
A photoacoustic gas sensor apparatus comprising:
- an integrated photoacoustic gas sensor component having an infrared source carried on a semiconductor substrate, an integrated microphone formed on one of, the same or a second semiconductor substrate, an infrared wavelength selective bandpass filter carried on a third substrate, and a measurement cell.
An apparatus comprising:
- a first housing which defines an internal sensing volume;
- and
- a second housing which carries an integrated gas sensing component which includes at least an infrared source carried on a semiconductor substrate, and a microphone formed on the same or a different semiconductor substrate where the second housing is carried at an open end of the first housing.
Dependencies are inferred from the claim text.