Advanced mixing system for integrated tool having site-isolated reactors
AssigneeIntermolecular, Inc.
InventorsKurt H. Weiner, Tony P. Chiang, Aaron Francis, John Schmidt
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Abstract
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.
Claims22
A method of mixed-mode processing of a substrate, comprising:
- generating a plurality of solutions from a plurality of chemicals, wherein a composition of the solutions is varied in a combinatorial fashion;
- and
- dispensing the chemicals and the solutions through a fluid delivery system to a conventional processing module and a combinatorial processing module wherein the combinatorial processing module comprises a plurality of site isolated reactors defining a plurality of site isolated regions on the substrate, wherein the delivery system feeding the combinatorial processing module is shared with the delivery system feeding the conventional processing module, such that the solution delivered to a first site isolated region in the combinatorial processing module can be varied independently from the solution delivered to a second site isolated region in the combinatorial processing module.
Dependencies are inferred from the claim text.