Molding Windows in Thin Pads
AssigneeApplied Materials, Inc.
InventorsBoguslaw A. Swedek, Doyle E. Bennett, Dominic J. Benvegnu
Life of this patent
Estimating the term…
Abstract
A polishing pad includes a polishing layer having a polishing surface, an adhesive layer on a side of the polishing layer opposite the polishing layer, and a solid light-transmitting window extending through and molded to the polishing layer. The solid light-transmitting window has an upper portion with a first lateral dimension and a lower portion with a second lateral dimension that is smaller than the first lateral dimension. A top surface of the solid light-transmitting window coplanar with the polishing surface and a bottom surface of the solid light-transmitting window coplanar with a lower surface of the adhesive layer.
Claims20
A polishing pad, comprising:
- a polishing layer having a polishing surface;
- an adhesive layer on a side of the polishing layer opposite the polishing surface;
- and
- a solid light-transmitting window extending through and molded to the polishing layer, the solid light-transmitting window having an upper portion with a first lateral dimension and a lower portion with a second lateral dimension that is smaller than the first lateral dimension, a top surface of the solid light-transmitting window coplanar with the polishing surface and a bottom surface of the solid light-transmitting window coplanar with a lower surface of the adhesive layer.
A method of making a polishing pad, comprising:
- a forming a recess in a polishing layer, the recess extending partially but not entirely through the polishing layer;
- forming a hole through the polishing layer and an adhesive layer, the hole positioned in the recess and having a first lateral dimension that is smaller than a second lateral dimension of the recess, the combination of the recess and the hole providing an aperture through the polishing layer and adhesive layer;
- securing a sealing film to the adhesive layer on a side opposite a polishing surface of the polishing layer to span the hole;
- dispensing a liquid polymer into the aperture;
- and
- curing the liquid polymer to form a window.
Dependencies are inferred from the claim text.