Finishing method for manufacturing substrates in the field of electronics

Abstract

The invention relates to a method for finishing the surface of semiconducting substrate that has a set of layers and a useful semiconducting layer on at least one of the faces of the substrate, wherein the useful layer has a rough free surface. The method smoothes out the rough free surface of the useful layer by creating a protective layer covering the surface of the useful layer with a thickness 1 to 3 times larger than the peak-to-valley distance of the surface of the useful layer, at least one polishing-oxidation sequence that includes the successive steps of polishing the surface of the protective layer, with the polishing being adjusted so as not to attack the useful layer, and performing a thermal oxidation with supply of oxygen gas of the substrate in order to transform a portion of the useful layer into an oxide layer and reduce the roughness of the surface of the useful layer.

Dependencies are inferred from the claim text.